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This digest paper reports on the first demonstration of suspended β-Ga2O3 nanostructures and nanomechanical resonators made from single-crystal β-Ga2O3 nanosheets or nanomembranes grown via low pressure chemical vapor deposition (LPCVD) on 3C-SiC epi-layer on Si substrate. These single-crystal β-Ga2O3 drumhead nanomechanical resonators offer robust multimode resonances at frequencies in the range...
The active search for candidates of an ideal switching device for low-voltage logic and ultralow-power applications has stimulated new explorations of contact-mode switches (relays) based on micro/nanoelectromechanical systems (MEMS/NEMS). This has been driven by the fundamental advantages that mechanical devices offer, such as ideally abrupt switching with zero off-state leakage, suitable for harsh...
This digest paper reports experimental demonstration of a new type of nanoelectromechanical device, combining contact-mode nanomechanical switching with sensitive integrated strain gauges in suspended thin (sub-100nm) silicon nanowires (SiNWs). By measuring and modeling the interesting coupling effects between mechanical strain and electrical transport in highly piezoresistive (PZR) thin SiNWs at...
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