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In this study, a novel planar inductor to detect the pressure sensor is proposed. The planar inductor consists of planar coil and CoFeB films. The proposed sensor exploits the inverse-magnetostriction effect to change the permeability of the CoFeB film by pressure load. This permeability variation will further result in the inductance difference of the planar inductor. Consequently the relationship...
This study extends the concept of capillary valve to realize a micro time-delay switch for safety and arming application. The presented device consists of working fluid (Glycerol), micro capillary valve with required time-delay mechanism design, and sensing electrodes. Thus, the delay time could be easily changed by (1) varying the geometry design of valve angle β and the neck-width w, and (2) selecting...
This study presents a novel single proof-mass tri-axis capacitive CMOS MEMS accelerometer to reduce the footprint of chip. A serpentine out-of-plane (Z-axis) spring is designed to reduce cross-axis error. A magnetic actuation for Z-axis self-test is also presented. The tri-axis accelerometer has been successfully implemented using TSMC 2P4M process and our in-house post-process. Measurement results...
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