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In this work, we present a cost effective Cu electroless (ELD-Cu) metallization scheme in which through-silicon vias (TSVs), can be scaled towards higher aspect ratios. We successfully integrated 30 nm ELD-Cu on 15 nm Ru in 3×50 µm TSVs on 300 mm wafer scale and found excellent electrical reliability. Cost calculations revealed the major impact of the implementation of the platable Ru liner material...
This paper presents a renewable biochemical oxygen demand (BOD) microsensor based on a sensing element of magnetically functionalized microorganism and a transducer of ultramicroelectrode array (UMEA). Different from the traditional BOD sensor which includes an immobilized microbial film, the magnetically functionalized microorganism was retained on the UMEA with a permanent magnet to simplify the...
We fabricated an optical interferometric gyroscope front-end with a tunable laser on the heterogeneous silicon platform. We successfully demonstrated a laser based gyroscope with low noise floor comparable to a commercial ASE based gyroscope.
The reconstruction of high dynamic range (HDR) images via conventional camera systems and low dynamic range (LDR) images is a growing field of research in image acquisition. The radiance map associated with the HDR image of a scene is typically computed using multiple images of the same scene captured at different exposures (i.e., bracketed LDR imzages). This approach, though inexpensive, is sensitive...
Infrared light emitting diodes efficiency based on GaAs substrate has been limited due to light trapping and total internal reflection of GaAs materials. In this paper we introduced a new method of combining surface plasmonic effect and photonic crystal structure to enhance not only light extraction efficiency but also internal quantum efficiency. Through Finite Difference Time Domain method we found...
Local saliency models are a cornerstone in image processing and computer vision, used in a wide variety of applications ranging from keypoint detection and feature extraction, to image matching and image representation. However, current models exhibit difficulties in achieving consistent results under varying, non-ideal illumination conditions. In this paper, a novel texture-illumination guided energy...
We demonstrate an on-chip optical spectrum analyzer (OSA) using two cascade optical ring resonators. The OSA's span is wider than 50nm and resolution is ∼0.1nm. A germanium photodetector and a p-i-n modulator are integrated on the chip and used for detection.
We demonstrate a graphene/nanotube hybrid phototransistor, in which photogating provided by the nanotube layer leads to a dramatically enhanced photoresponsivity (>100A/W) in the visible range, corresponding to ∼104 enhancement with respect to a graphene-only device.
A single 160 Gbaud Nyquist channel transmission based on coherent matched sampling under 4 km lab-emulated free-space turbulence link is demonstrated. Turbulence induced power fluctuation is found to be main reason of performance deterioration.
Emerging evidence has suggested that the pathophysiology of obsessive compulsive disorder (OCD) might involve widely distributed large-scale brain systems. The dysfunction within salience network, which is comprised of dorsal anterior cingulated cortex (dACC) and bilateral insular areas, has been proposed to contribute to OCD onset. The mechanism underlying salience network abnormality remains unclear...
The coupling of cerebral blood flow (CBF) to neuronal activation, referred to as activation flow coupling (AFC), has been a fundamental brain physiology property. The stimulus-evoked CBF response was usually considered as a surrogate marker for neuronal activity in AFC studies. The selection of appropriate stimulation parameters, e.g., current amplitude and pulse width, is of great importance yet...
A novel hybrid model is proposed in this paper to describe the highly-nonlinear hysteretic relationship between the torque and angular velocity in a magnetorheological pin joint (MRP). The MRP's hysteresis loop is modelled by a mixture of hyperbolic and Gaussian functions using the curve fitting technique, resulting in a significant reduction of the model parameters. To identify the model parameters,...
One of the main challenges confronted by wireless sensor networks (WSNs) is to reduce energy consumption of nodes for the purpose of network lifetime extension. In the literature, many backbone based protocols such as connected dominating set (CDS) and broadcast or multicast based protocols are employed in order to improve network performance in terms of metrics like energy consumption, number of...
A photodetector based on SWNT-graphene hybrid films and facile fabrication steps is demonstrated, which exhibits a remarkably high photoresponsivity of ∼ 100 A/W, across visible (400 nm) to the telecommunication wavelengths (1550 nm).
For hydraulic hybrid excavators (HEEs), two recoverable energy sources for power hybridization are from engine optimization and actuator energy regeneration. This paper presents a hydraulic hybrid system that integrates with these two sources using engine torque coupling and boom energy regeneration, thus to further explore the fuel economy potential of HHE. Their different characteristics are analyzed...
An emulation method using Fourier transform and Fresnel theory is utilized to characterize beam propagation through free-space turbulence link. A spatial light modulator is utilized for the generation of phase screens to emulate the turbulence effects based on Fourier transform method. Fresnel theory based scaling is used to emulate the long-range turbulent propagation. Simulation results of 4 km...
In this work, a fully integrated on-chip electrochemical microreactor fabricated by MEMS technique is reported for the detection of total phosphorus (TP) in freshwater. Both a ultra-violet (UV) photocatalytic digestion unit and an electrochemical three-electrode unit are integrated on a chip to realize the microreactor. Without additional oxidizing reagent, a fully compatible electrochemical detection...
Adding functionality to a passive Si interposer used in 2.5/3D integration, can result in system cost reductions. In this work, active components (diodes, BJT, …) have been integrated on Si interposer using a new low-mask process flow. This low-cost process enables: (1) to move part of the area hungry ESD protection from the stacked dies to the interposer; (2) the realization of pre-bond testable...
An atomisitic etching model is combined with a continuum concentration solver in order to realistically simulate various effects during Deep Reactive Ion Etching (DRIE or the Bosch process). This includes microloading (or loading effect) and Aspect Ratio Dependent Etching (ARDE or lag effect). The model strongly differs from the current simulation approaches in which the local etch rate depends markedly...
For both power/ground and data carrying TSVs, TSV resistance is preferred to be as low as possible. Power/ground TSVs should exhibit larger TSV capacitance so that TSV can act as a decoupling capacitor while data TSVs should exhibit low TSV capacitance enabling larger data rates. Monolithic integration scheme employing the annular isolation ring to isolate the data and power/ground TSVs is proposed...
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