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The paper presents a thermo-optic tunable laser that makes use of a micromachined etalon to form the external cavity. The wavelength tuning is obtained by the thermo-optic effect of the silicon material. In experiment, a wavelength tuning range of 14 nm is demonstrated by applying a heating current of 18.7 mA to a deep-etched silicon etalon of 206 mum wide. In the dynamic test, this laser measures...
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