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Dynamic optical techniques (light emission and laser stimulation techniques) are routinely used for precise IC defect localization. As device technology is more and more shrinking, developing new techniques for defect localization is becoming a crucial challenge. Dynamic Laser Stimulation (DLS) techniques based on near-infrared laser scanning are used for failure analysis, design debug and time margin...
Optical techniques (light emission and laser stimulation techniques) are routinely used for precise IC defect localization. At the early stage of an analysis, choosing the right technique is an increasingly complex task. In some cases, one technique may bring value but no the others. Using an 180nm test structure device we present results showing the complementary of emission microscopy (EMMI), time-resolved...
Thermal laser stimulation (TLS) techniques have demonstrated their ability to detect and locate defects in integrated circuits (IC). Optical beam induced resistance change (OBIRCH) and all derivatives are based on the same physical principle: local laser heating of integrated circuits. The purpose of this paper is to synthesize the extensive work done in this area in order to highlight the essential...
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