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In the paper technology and properties of the simple acoustic wave force sensor are presented. The sensor consists of LTCC (Low Temperature Co-fired Ceramic) cantilever with an active layer made of PZT (Lead Zirconate Titanate) tape with two IDTs (Inter-Digital Transducers). The cantilever dimensions of test samples are set to 25×8×0.5 mm3. The interdigital electrodes with designed line/space width...
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