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Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors...
MEMS resonators have been discussed as replacements for quartz crystals in electronics timing applications for more than 40 years. There have been impressive demonstrations of many important characteristics for resonators and oscillators throughout the last 20 years. However, MEMS resonators had always exhibited unacceptable levels of long-term frequency drift. Recent work has shown that placement...
Packaging of microelectromechanical systems (MEMS) is a critical step in the transition from product development to production. This paper presents a robust, hermetically-sealed encapsulation method that can accommodate many traditional MEMS devices by allowing large lateral deflection structures within a clean environment. Using the new technology described in this paper, trench widths ranging from...
MEMS devices must be packaged to be used. Unfortunately, MEMS packages are challenging to develop, and the packaging of MEMS devices often dominates the cost of the product. In recent years, our group has worked with a team from Bosch to develop and demonstrate a novel wafer-scale encapsulation approach for MEMS. This process uses MEMS fabrication steps to build the device and the package at the same...
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