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Electromagnetic field and circuit theory combined is applied to calculate the impulse grounding impedance in HVDC transmission line towers in this paper. The mutual inductance of conductor segments are taken into account. At the same time, the images of the self resistance and mutual inductance are considered for the different medium (soil and air) interface on the surface of the ground. To calculate...
High-density piezoelectric micromachined ultrasonic transducer (pMUT) arrays have been designed and fabricated using silicon based micromachined process. These devices are based on a novel structure called “reverse-bonding”. Experimental results show that they have excellent performance, suitable resonance frequency and high reliability. The fabricated pMUT arrays are very promising for 3-D medical...
We present a MEMS-based flexible subdural electrode array for neural recordings. The electrode array is fabricated on a composite substrate of polyimide and biomedical-grade polydimethylsiloxane(PDMS). The electrodes are deposited on polyimide layer, and the whole device is packaged by PDMS. Ablating with a CO2 laser is applied to expose the electrodes sites. The surface of the electrodes is modified...
We present implantable subdural electrode arrays (ISEA) for neural recordings based on MEMS technologies. The electrode array is fabricated on a thin polyimide substrate and then encapsulated with biomedical-grade polydimethylsiloxane (PDMS). Then laser ablating with a CO2 laser is applied to expose the electrode sites. Prototypes of 4times4 gold electrode arrays are fabricated with an exposed electrode...
Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach for the construction of 2-D arrays for real-time 3-D medical imaging. In this work, 6times6 pMUT arrays with element pitch down to 150 mum were successfully fabricated and characterized. The devices consist of 2 mum PZT film on a 3 mum Si/SiO2 supporting layer, and the multilayered membrane was released by a two-step process...
Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized...
Design optimization of beam-like ferroelectrics-silicon integrated microphone and microspeaker is studied. The Pt/Pb(Zr,Ti)O/sub 3//Pt/SiO/sub 2//Si/sub 3/N/sub 4/ cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and...
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