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The application of SiN/SiCxN stack as capping layer of damascene Cu/ULK interconnect was discussed. The stack film of ultra-thin SiN+SiCxN Cu capping films were fabricated by plasma enhanced chemical vapor deposition (PECVD) method, which consisted of ultra-thin SiN as barrier and SiCxN as etch stop layer. The resistance and capacitance of Cu/ULK and the capping film SIN/SiCxN was measured by regular...
Traction oil film thickness calculation is done on a kind of continuous velocity transmission which is named traction infinitely variable transmission (TIVT). It is proved that transmission type of TIVT is traction drive rather than friction drive through design on roughness, material of parts and traction oil. Dynamic seal and roller deformation are analyzed through building models and making calculations...
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