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The SGADER (Silicon Glass Anodic-bonding and Deep Etching Release) technology is a well-developed platform for many MEMS devices. An anti-footing aluminum film is a low cost but effective approach to minimize the footing effect in SGADER process, but such Al film cannot be removed completely with normal Al wet etchant after DRIE. In this paper, an optimized etching process for cleaning the anti-footing...
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