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This paper presents an easy-to-use and efficient implementation of the added mass method for calibrating various atomic force microscope (AFM) probes without damage to the probe, which is based on the added mass method. The method is achieved by using a pneumatic control system and a home-made glass micro-pipette. Compared with the conventional added mass method, this method achieves the operation...
In this paper, micromachined longitudinal wave resonant mass sensors operating near 1 GHz in a liquid environment are investigated and characterized. Mass sensitivities of the film bulk acoustic resonator (FBAR) and high-tone bulk acoustic resonator (HBAR) microbalances with small size are measured to be 782.7 cm2/g (50 times larger than that of conventional bulky quartz crystal microbalance) and...
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