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This paper presents a vibration amplitude measurement method that greatly reduces the effects of baseline resistance drift in an all-polymer piezoresistive flow sensor, or microtuft. The sensor fabrication is based on flexible printed circuit board (flex-PCB) technology to enable the potential for low-cost and scalable manufacture. Drift reduction is accomplished by discriminating the flow-induced...
This paper presents an out-of-plane micromachined piezoresistive flow sensor array based on laser micromachining of polymer films, microstencil printing, and stress-engineered curvature. The developed process is suitable for low cost, large-area sensor array fabrication, and can leverage traditional flex-circuit fabrication. Each device is composed of an out-of-plane curved microtuft formed from laser-machined...
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