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A high-purity semi-insulator 4H-SiC intrinsic photoconductive switch is presented. The photoconductive semiconductor switch device is fabricated as lateral structures with the electric contact on the same side. The effect of the SiO2 passivation layer has been investigated on the breakdown voltage. The minimum ON-state resistance is 16 $\Omega $ , and the breakdown voltage is 11 kV. A new phenomenon...
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