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A single-pixel spectral line imager based on a highspeed MEMS grating scanner is demonstrated to possess the capability of resolving 104 spectral bands and 250 spatial pixels. Delauney Triangulation is used in the signal processing to correct the spectral image distortions.
A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing.
This paper demonstrates the design, fabrication and characterization of a micromachined electrostatic double-layered vibratory grating scanner for high speed, high optical resolution laser scanning applications. The prototype scanner with a 2mm diameter diffraction grating is capable of scanning a laser beam at around 21.591kHz with an optical scan angle of 33.5°, resulting a θopticalD product (product...
This paper presents an effective method to achieve synchronized laser scanning of multiple beams by using MEMS diffraction gratings with their resonant frequency fine tuning mechanisms. Multiple gratings are actuated in-plane by a common electrostatic comb-driven resonator and their resonant frequencies can be fine-tuned to compensate the micromachining process errors. Continuous and reversible resonant...
MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging...
A novel micromachined electrostatic double-layered vibratory grating scanner has been successfully developed for high-speed high-resolution laser scanning applications. This paper presents its design, modeling, fabrication, and measurement results. A comprehensive dynamic model considering the geometric nonlinearity of the platform suspension flexures is also proposed to predict the dynamic performance...
A novel hyperspectral imaging application of the MEMS grating scanner is proposed in this paper. By utilizing the high-speed and optically dispersive characteristic of the grating scanner, a potentially low-cost, small footprint configuration is demonstrated. High-speed scanning without significant optical degradation due to dynamic deformation of the platform is possible using grating scanner. The...
A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.
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