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We present the film bulk acoustic wave resonator‐based ultramass‐sensitive (FBAR‐UMS) sensors in which their resonance characteristic improvements, mainly due to Bragg reflector (BR) annealing, favorably influence their performance factors. We fabricated two kinds of FBAR‐UMS sensors, respectively, with nonannealed and annealed BRs (namely, nonannealed and annealed sensors) and investigated the effects...
As a possible solution for the cost-effective electrode formation of flexible piezoelectric ZnO nanogenerators, silver-based electrodes are chosen and investigated. The four types of silver-based top-electrodes are fabricated on ZnO thin films by different process conditions or techniques. Results show that the local oxidation of silver-based electrodes in the flexible piezoelectric ZnO nonogenerators...
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