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A new compact micro‐x‐ray fluorescence (μ‐XRF) spectrometer covering wide range of elements was developed and fabricated. The working capabilities of this new compact custom‐made μ‐XRF spectrometer are presented. The spectrometer uses a low power Rh target x‐ray tube for sample excitation. Polycapillary optics focuses the polychromatic beam down to 40 μm. The emitted radiation is measured by a peltier...
The use of polycapillary optics in confocal micro‐X‐ray fluorescence analysis (CMXRF) enables the destruction‐free 3D investigation of the elemental composition of samples. The energy‐dependent transmission properties, concerning intensity and spatial beam propagation of three polycapillary half lenses, which are vital for the quantitative interpretation of such CMXRF measurements, are investigated...
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