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We have studied diffusion and condensation of adatoms on surfaces on which we have introduced inhomogeneous roughness by means of electron irradiation. We have constructed the model of the dynamics of adatoms on the surfaces, and demonstrated that the distribution of adatoms strongly depends on the surface roughness. The results suggest that the distribution of adatoms can be controlled by selecting...
We studied on ultrasonic bonding of Au bumps. Recently some commercial bonding machines that are furnished ultrasonic vibrator have been developed. In these machines bonding temperature can be decreased drastically. Many Au bumps (width 50 mum) were made on Al pads using photo-lithography technology. Three kinds of UBM (under bump metal) that Ti evaporation, Cr evaporation, and the non-electrolyzed...
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