The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A highly sensitive temperature sensor based on a side-hole fiber filled with indium was proposed and its optical characteristics were experimentally demonstrated. The temperature sensitivity of the sensor was estimated to be dλ/dT=−7.5 nm/°C.
This paper presents a generic vacuum packaging technology for environment-resistant MEMS devices. This packaging approach simultaneously provides low-power oven-controlled thermal environment and vibration isolation using an isolation platform. The oven-controlled structure is thermally isolated from the environment by crab-leg suspensions made out of a 100 mum-thick glass wafer, an anti-radiation...
This paper presents a new generic MEMS packaging technology for thermal and vibration isolation of a MEMS device using an isolation platform crab-leg shaped isolation suspension beams, fabricated from a 100 mum-thick glass wafer. The packaging technology is both hermetic and vacuum compatible to pressures <10 mTorr, and it provides vertical feedthroughs for signal transfer. A new and generic MEMS...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.