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Now an accurate metrology of Silicon-Germanium (SiGe) thickness and Ge concentration is becoming more and more important for beyond 40nm technology. Traditional solution is normally Transmission Electron Microscope (TEM) for thickness and Second Ion Mass Spectrometry (SIMS) for Ge concentration, which is suffering from sample destruction and makes inline monitoring impossible. On the contrary, optical...
DNA-wrapped multiwalled carbon nanotubes (MWCNTs) were successfully obtained by a simple sonication treatment method. The obtained materials were characterized in detail by Raman spectroscopy and scanning electron microscopy (SEM). An SEM image showed that MWCNTs were dispersed sufficiently and covered entirely with DNA. This resulted in high aqueous solubility of the products, with a stability of...
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