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Based on experimental results and a dedicated model, the impact of various technological parameters on the performance of a frequency addressed NEMS arrays sensor is investigated for mass sensing application. It is shown that the number of NEMS resonators that can be addressed in parallel is limited by critical dimensions fluctuations, the quality factor of the NEMS and their resonance frequencies.
We demonstrate the first implementation of a highly doped, silicon nanowire electromechanical resonator that exploits the depletion charge modulation in a junctionless FET to transduce mechanical motion on-chip. The resonator, with a typical length between 1 and 2 μm, a total height of 45 nm and a total width of 65 nm, is coupled via two lateral 60 nm air-gap gate electrodes. A fundamental resonance...
Similar to transistors, the size of MEMS components is continuously shrinking, progressing from MicroElectroMechanical Systems to NanoElectroMechanical Systems (NEMS). Indeed, NEMS are emerging as a new field of interest because their submicron dimensions make them converge towards CMOS fabrication processes. They have specific advantages such as fast response time and high detection sensitivity when...
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