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In this work, deformation and focal length of a circular shape micro deformable mirror under different applying voltage is analyzed. This mirror has round shape. And it is circular clamped. In this work, the mirror is designed as MEMS (Micro-electro-mechanical systems) device. Therefore, it is considered to be fabricated by silicon-based micromachining. Such that, the material used as structure layer...
In this work, a micro focusing deformable mirror is designed for fabricated by combination with silicon and nonsilicon based micromachining. The upper electrode and mirror is designed and made by traditional silicon based micromachining in silicon substrate. And lower electrode is fabricated at aluminum substrate. However, the lower electrode is fabricated by nonsislicon based micromachining. From...
Lateral motion micro thermal actuator is one of an important actuator for its large deformation and driving force. The lateral motion electrothermal actuator is often fabricated by surface micromachining. The out of plane deformation would be induced by residual stress, due to mismatch of thermal expansion coefficients between structure and sacrificial layers.Such deformation has advantage to overcome...
During wet etching of micromachining, the cantilever beam is often attached to the underlying substrate due to the capillary force even the wafer being spin dry. The effect of rinse length and position of liquid on sticking phenomena is discussed is this work. Two critical gaps to determine the cantilever beam being sticking or not are derived. The results show the beam is a little more easily attached...
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