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We report on measuring radiation effects of energetic oxygen ions on silicon carbide (SiC) diaphragm resonators. Micromachined SiC diaphragms (1 mm × 1 mm × 2μm) vibrating at ∼200–800 kHz on multimode resonances are exposed to 14.3 MeV oxygen ions to sensitively probe the radiation effects of high-energy ions. We have observed frequency redshifts as large as ∼2.6%, as well as quality (Q) factor degradation...
We present the first experimental demonstrations of ultrathin hexagonal boron nitride (h-BN) circular drumhead vibrating resonators with multiple modes, operating in a wide temperature range from −7°C to 141°C, by characterizing flexural-mode resonances of the devices. We fabricate h-BN resonators with down to 10nm-thick h-BN crystalline flakes using a wet-chemistry-free, all-dry transfer technique...
We report on the measurements and modeling of mechanically-coupled arrays of very thin silicon carbide nanowire (SiC NW) nanomechanical resonators. The exceptional mechanical properties and attractive optical properties of SiC make it highly interesting for resonant nanoelectromechanical systems (NEMS), with resonant modes operating at high frequencies that can be exploited for resonance-based signal...
Vibrating nanoelectromechanical systems (NEMS) made of atomically-thin two-dimensional (2D) crystalline nanostructures have demonstrated attractive potential for making new actuators and sensors. Nanoscale devices in new types of 2D materials are generally first obtained by mechanical exfoliation, which can often lead to irregular and asymmetric geometries. Here we investigate irregular molybdenum...
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