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On semipolar GaN(112¯2), epitaxial ZnO grown by chemical vapor deposition can form in two different semipolar orientations as evidenced by transmission electron microscopy and X-ray diffraction. One orientation relationship is shown to be ZnO(112¯2)//GaN(112¯2) and [1¯100]ZnO//[1¯100]GaN which is expected for ZnO growth on GaN(112¯2), while the other is a newly found relationship of ZnO(1¯011¯)//GaN(0002)...
Rib and strip chalcogenide waveguides were demonstrated using photolithography technique and reactive ion beam etching method in a CF 4 /Ar atmosphere, based on Ge–Sb–Se films deposited by radio-frequency sputtering. The study of compositional, morphological and structural characteristics of the films was investigated, the propagation losses with different widths were measured and optical...
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