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We have developed a high flow rate stable liquid dispensing system by using a low energy consumption actuator. It is made of a piezoelectric (PZT) actuating porous membrane with the resonant frequency of the system, featuring relatively small movement parts with a robust structure. Taking advantage of the high latent heat during phase changes from water droplet to vapor, we were able to remove heat...
The PZT actuated porous membrane device with micro-scale nozzle array and generating the micro-scale liquid droplet with maximum flow rate of 20 ml/min is developed in this study. It could be used in the application of CPU cooling. It consists the advantages of simple and easily manufactured of the structure with PZT actuator. The pumping flow rate is independent of back-pressure and negative pressure...
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