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AlGaN/GaN single heterojunction bipolar transistors (SHBTs) without using regrown emitter junction are demonstrated. Secondary ion mass spectroscopy analysis shows that a severe codiffusion of Al and Si exists in AlGaN/GaN heterostructures grown at 780 °C. The altered composition and doping profiles greatly degrade the common-emitter current gain of AlGaN/GaN HBTs to ≤0.8. A GaN spacer layer is inserted...
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