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As a promising candidate for next generation lithography, multiple e-beam lithography (MEBL) is able to improve manufacturing throughput using parallel beam printing. In MEBL, a layout is split into stripes and the layout patterns are cut by stripe boundaries, then all the stripes are printed in parallel. If a via pattern or a vertical long wire is overlapping with a stitch, it may suffer from poor...
To address the routability issue, routing congestion estimators (RCE) become essential in industrial design flow. Recently, several RCEs [1–4] based on global routing engines are developed, but they typically ignore the effects of routing on timing so that the identified routing paths may be overlong and thus impractical. To be aware of the timing issues, our proposed global-routing-based RCE obeys...
Local routing congestion is becoming increasingly important as complex design rules make local pin access the bottleneck for modern designs and routers. Since congestion analysis based on global routing does not model these effects, routability-driven placement and physical synthesis fail to alleviate local congestion. This work models routing congestion at the placement level in order to apply local...
We present a novel power-aware yield enhancement design methodology and reconfiguration scheme for deep submicron SRAM designs. We show that with the continued trend of raising array supply to counter process variations, it is more effective to use a per-element selectable virtual power-supply scenario as opposed to single array supply with traditional redundancy schemes. The element can be a bank,...
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