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This paper presents the humidity sensing properties of the sensor based on graphene oxide (GO) films with different dispersion concentrations. A CMOS interdigital capacitance was used as the basic structure. The relationship between the sensing properties and dispersion concentrations is studied, by dripping four GO dispersions of different concentrations on the sensing area of the sensor chip, which...
This paper presents a CMOS interdigital capacitive humidity sensor based on graphene oxide, and the sensitivity of this humidity sensor was improved significantly by using graphene oxide as sensing material. The passivation between the Al electrodes and the sensing material was used to ensure the reliability of the capacitive-type humidity sensor. The experimental results show that, compared with...
This paper presents a fully packaged CMOS interdigital capacitive humidity sensor with polysilicon heaters. The sensor was fabricated with the industrial standard CMOS process and the MEMS postprocessing step. Polyimide was used as the sensing material for its good linearity. To enlarge the depth of the recesses between the interdigital electrodes, the polysilicon heater was placed under the Al electrode...
A CMOS interdigital capacitive humidity sensor with polysilicon heaters is presented. Polyimide was used as the sensing material. In order to find out the relationship between filling effect of deposited polyimide and the spacing distance of Al electrodes, another interdigital capacitive humidity sensor with no passivation around Al electrodes was also fabricated. The measured results show that good...
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