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Silicon (Si) nanowires have been widely used as sensor and heater in various fields such as biology and chemistry due to its high sensitivity and fast responsivity. In this paper, we measured the temporal response property of Si nanowire-heater through infrared microscopy. Nanowire-heaters were fabricated using silicon-on-insulator (SOI) wafer with Si heights of 15 μm and 30 μm, respectively. In order...
The temperature control and measurement of micro-heater in microfluidic devices are very essential in various application fields such as gas sensors, flow sensors and bio-sensors. In this study, the temperature of a micro-heater was measured while applying voltages to micro-heaters with 100 μm width in microfluidic devices using infrared microscope. The Au micro-heater was fabricated onto a sapphire...
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