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The microring resonator is critical for dense wavelength division multiplexed (DWDM) chip-to-chip optical I/O, enabling modulation and channel selection at the $\upmu\text{m}$-scale suitable for a VLSI chip. Microring-based links, however, require active tuning to counteract process and thermo-optic variations. Here, we present a bit-statistical tuner that decouples tracking of optical one- and zero-levels...
We demonstrate efficient photonic devices that rely on sub-100nm features in unmodified 45nm SOI CMOS, including photonic crystals, array-antenna grating couplers, and modulators. We then show monolithically integrated electronic-photonic systems comprising millions of transistors and thousands of photonic devices, including a complete chip-to-chip photonic link.
A record low energy (250fJ/bit) intra-chip electronic-photonic link is demonstrated at 5Gb/s on a 3D-integrated wafer using through-oxide-vias (1.45fF-per-via) for the first time. The receiver sensitivity was −19.3dBm and the on-chip laser energy was 6fJ/bit.
A new thermal tuning circuit for optical ring modulators enables demonstration of an optical chip-to-chip link for the first time with monolithically integrated photonic devices in a commercial 45nm SOI process, without any process changes. The tuning circuit uses independent 1/0 level-tracking and 1/0 bit counting to remain resilient against laser self-heating transients caused by non-DC-balanced...
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