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This paper presents series three-axis micro-force sensors which are based on piezoresistive effect. The structure of these sensors include two critical parts, one central mesa suspended by four single-crystal-silicon sensing beam and one quartz optical fiber probe with ladder structure. By changing the length of the probe, we can get series sensors with different sensitivety and measurement range...
We described an optical micro-electro-mechanical-system (MEMS) pressure sensor based on light intensity modulation that can be used in petrochemical and oil well area. The idea is to use light for transmission to replace electrical signals. Utilizing bulk micromachining technology of silicon, a membrane is obtained for sensing pressure and reflecting the light. The intensity of reflected light shifts...
A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOI). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOI wafer, which can be used in extreme high temperature environments, and applied the technology...
In order to solve the pressure measurement problem in the harsh environment, such as high temperature above 200degC, a special piezoresistive pressure sensor chip has been developed. Based on the MEMS (micro electro-mechanical system) and SIMOX (separation by implantation of oxygen) technology, the piezoresistive pressure sensor chip was constituted by silicon substrate, a thin buried silicon dioxide...
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