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The design, fabrication and testing of a novel electro-thermal linear motor is presented in this paper. The V-shape electro-thermal actuator arrays, micro lever, micro spring and slider are introduced. In moving operation, the linear motor can move 1 mm displacement while keeping the applied voltage as low as 17 V. In holding operation, the motor can stay in one particular position without consuming...
A novel high- speed image super-resolution algorithm based on sparse representation for MEMS defect detection is proposed in this paper. Traditional super-resolution algorithms adopt a single dictionary to represent images, which cannot differentiate varieties of image blocks and leads to slow processing speed. Aiming at overcoming this shortage of traditional super-resolution algorithms, image blocks...
This paper presents the design, fabrication and test of a triaxial cutting force dynamometer based on MEMS (micro-electro-mechanical system) technology. MEMS chip was utilized as transition element of the designed dynamometer because of its excellent sensitivity, favorable accuracy and high integration. In order to measure triaxial cutting forces, an innovative structure of two mutual-perpendicular...
This paper presents a three-component force sensor with MEMS gauges attached to its sensitive beams, which could be monolithically machined without assembly. All the sensitive areas of the dynamometer are designed on outer surfaces, which could contribute to the bond of gold wires onto the MEMS chips. Rough theoretical models are abstracted based on Euler beam theories, and Wheastone bridge circuits...
The design, fabrication and characterization of a novel electrothermal actuator for MEMS safety-and-arming devices are presented in this paper. The device is comprised of two V-shape electrothermal actuators, a V-beam amplification and a mechanical slider. The two V-shape electrothermal actuators generate the original displacement and the V-beam amplification is used to amplify this displacement for...
Vibration acceleration detection of spindle monitoring requires that the accelerometer has an adequate measurement sensitivity and response frequency above the interested range. This paper aims at design a kind of micro-electro-mechanical system (MEMS) accelerometer that can be used in the spindle component's vibration detection. To measure the vibration acceleration of the high speed spindle accurately,...
A MEMS (Micro-electro-mechanical systems) fluid viscosity sensor with resonant trapezoidal micro cantilever is introduced in this paper. The fluid viscosity can be measured through the relationship between the fluid viscosity and the quality factor, the resonant frequency of the micro cantilever immersed in the fluid. In order to improve the sensitivity of the viscosity sensor, the geometry of the...
To satisfy the requirement of measuring high shock acceleration for hard target smart fuze, a double-end fixed beam structure of MEMS piezoresistive high g accelerometer is proposed. The designed sensor is based on the combination of Silicon on Insulator (SOI) solid piezoresistive material and Micro Electro Mechanical Systems (MEMS) technique. Based on the principle of the sensor, stress analysis...
In this paper, we describes an integrated MEMS tactile tri-axial micro-force probe sensor based on piezoresistive for Minimally Invasive Surgery (MIS) as it's micro-structure, three-dimensional measurement and high resolution up to be micronewton (μN) scale. The sensor is 4 × 4 × 20.9 mm3. The sensing element of the sensor is fabricated on Silicon on Insulator (SOI) wafer by surface and bulk micromachining...
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