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There are, in practice, so many control systems possesses this kind of special feature, e.g., ballistic missile's maneuver couples with wind gusts, acceleration signal measured by accelerometers couples with the external and internal noises, and so on. Generally, the input signal u(k) is always assumed as an exactly known variable and never corrupted with noise; hence one is capable of dealing with...
A novel MEMS spiral capacitor on glass substrate has been designed, simulated and fabricated. The square spiral capacitors with different width, space, thickness and turn number have been studied by HFSS. The fabrication process has been developed based on copper electroplating, and it is compatible with the copper inductor fabrication process, which can be integrated into LC filter. Finally, spiral...
An advanced elimination algorithm based on the dynamic PID control concept for treating drift rate effects of MEMS-Based inertial devices, such as accelerometer and gyroscope is proposed in this investigation. Effects of drift rates of inertial devices strongly influence the performance of the relative motion sensing products that are designed by MEMS-based inertial devices, e.g., small regions of...
In this paper, the MEMS-based IMU (Inertial Measurement Unit) was used in a fusion navigation system comprising a MEMS-based IMU and a GPS device with the map database. The attitude angle of a vehicle at a specific location is detected by the MEMS-based IMU and compared with the identifying information from the map database for judging whether the vehicle is on a correct route or not. The fusion navigation...
This paper presents the research results related to a new type of flexible capacitive micromachined ultrasonic transducers (cMUT) named "Sonic Paper". In this study, the novel design concept, relevant processing steps, and characterization experiments associated with the Sonic Paper were introduced. Compared with the existing curved or flexible CMUT, the Sonic paper features in simpler fabrication...
An investigation about the robust estimation of the INS (inertial navigation system) that is mainly integrated by MEMS-based micro inertial devices (accelerometer and gyroscope) is presented in this study. The robust estimator of INS includes two parts: a regression form fuzzy system that is adopted to approximate the unknown acceleration and angular rate commands come respectively from the MEMS-based...
An investigation about the mixed H2/H∞ estimation of the INS (inertial navigation system) that is mainly integrated by MEMS-based micro inertial devices (accelerometer and gyroscope) is presented in this study. The mixed H2/H∞ estimator of INS includes two parts: a regression form fuzzy system that is adopted to approximate the unknown acceleration and angular rate commands come respectively from...
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