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Recently, microgrinding using a polycrystalline diamond tool has been introduced to fabricate microchannels and structures from quartz (fused silica). Compared to wet or dry etching processes, the grinding process is very simple and time-efficient for prototyping. However, the roughness of the machined surface remains an issue, because the surface is covered with many small cracks. Poor surface roughness...
Effects of annealing on the properties of a structure made of copper (Cu) and low dielectric constant (low-k) plasma polymer films were investigated. Low-k plasma polymer films used in the experiment were deposited using a mixture of decahydronaphthalene (C 10 H 18 : DHN) and tetraethylorthosilicate (Si-(O-C 2 H 5 ) 4 : TEOS) as the precursors and...
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