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This paper presents the design of a tunable capacitor that integrates two vertical comb-drive tunable capacitors and a parallel plate tunable capacitor. The parallel plate tunable capacitor is in the middle of the comb-drive tunable capacitors. The vertical comb-drive part has sets of fixed and moving fingers while the parallel plate has fixed and moving plates. The capacitor is fabricated using the...
A hybrid micro-electrostatic actuator is presented. The actuator integrates a vertical comb driving (VCD) unit and a parallel-plate driving (PPD) unit. The hybrid actuator is fabricated using a one structural layer microfabrication process, i.e., MetalMUMPs instead of a two-layer microfabrication process needed for traditional vertical comb-drive actuators by taking advantage of the residual stress...