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Abstract Extended X-ray absorption fine structure (EXAFS) was used to determine the local structure of the luminescent centers in Tb3+ and Ce3+ -doped strontium sulfide thin films deposited by Atomic Layer Epitaxy (ALE). The rare earths were observed to enter mainly the substitutional sites but at the same time a part of the atoms form RES clusters (RE = rare earth). The presence of both substitutional...