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We report a 8-12-μm-diameter 210-μm-length penetrating silicon probe array assembled by vapor-liquid-solid (VLS) growth, for use in multi-site recordings of neuron spikes in a brain cortex. A 3-μm-diameter silicon probe-tip metalized with platinum (Pt)-black by the electroplating, exhibits low enough probe impedance of 103 kΩ and a more than 90% output/input ratio (1 kHz) for spike recordings. Through...
We report in-vitro multisite field potential recordings from fish retina using a vertically integrated silicon (Si) microprobe array. Eight active channels of the enlarged probe-head ldquoKokeshi (Japanese dolls)rdquo type Si probe enabled multisite electrical recordings of retinal responses (electroretinograms (ERGs)) to white light stimuli. The ERG a- and b-waves were obtained at each probe, and...
This paper presents a very thin silicon dioxide microtube electrode array, which has sub ten-micrometers in inner diameter, as a neural interface device with high signal-to-noise ratio and low invasiveness. The device was realized by using out-of-plane silicon dioxide microtube arrays fabricated from vapor-liquid-solid growth and microfabrication techniques. Here we report advantages of electrical...
We report applications of sub-5 μm diameter silicon microprobes and silicon dioxide microtubes fabricated by vapor-liquid-solid method and microfabrication techniques, to use in in-vivo animal experiments. Before animal experiments, electrical impedance and test signal detection via the microprobe electrode were investigated. According to the results, electrical impedance at 1 kHz is approximately...
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