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The energetics of silyl (SiH 3 ) precursor surface adsorption and hydrogen abstraction on a monohydride terminated silicon surface are described. The abstraction of surface hydrogen by H radicals is more exothermic, and proceeds with a smaller kinetic barrier than H abstraction by silyl. Surface adsorption and abstraction were analyzed using both multi-parent configuration interaction (CI)...
X-ray photoelectron spectroscopy (XPS) and medium energy ion scattering (MEIS) are used to determine chemical bonding and composition of ultra-thin films of mixed yttrium, silicon, and oxygen, formed by oxidation of metal on clean and pre-treated silicon. XPS and MEIS analyses indicate that oxidation of yttrium on bare silicon results in a fully oxidized film with a significant fraction of Y-O-Si...
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