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A topography simulation of BiCS memory hole etching is performed. The model parameters are fitted by elementary experiments of Si and SiO2 etching, and BiCS topography simulation is performed without parameter fitting. Our new model describes the experimental topography of BiCS memory hole, including taper angles and undercuts of stacked films. The point of the modeling is that it takes into consideration...
A direct diode laser (DDL) system has been proposed, consisting of a laser diode (LD), planar lightwave circuit(PLC) and optical fibers. The output from one PLC module is a 320 um times 300 um bundle optical fibers, each fiber having a rectangular core of NA0.3. The output efficiency was 74.2% at the fiber end. This PLC module may be applied as the light source for DDL processing or for the excitation...
CoOx thin films with perpendicular magnetic anisotropy (PMA) were prepared at room temperature by the reactive facing-target sputtering technique. We investigated the PMA, coercivity and static magnetization process of the film samples, with the following results. (1) CoOx films with a columnar structure are composed of hep Co and fcc CoO. (2) The highest perpendicular anisotropy energy Ku was 2.3??10...
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