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The thermodynamic behaviors of charged point defects in unintentionally-doped ZnO thin films were investigated. The as-grown sample displayed two different types of blue-emission bands: one at ∼2.95 eV from native-donor zinc interstitial (Zni) and the other at ∼3.17 eV from native-acceptor zinc vacancies (VZn). In the samples annealed at oxygen ambience, VZn-related emission was dramatically...
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