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A novel dopant segregated Schottky barrier (DSSB) FinFET SONOS device is demonstrated in terms of multi functioning in a high speed NAND-type flash memory and capacitorless 1T-DRAM. In addition, a novel program mechanism that uses energy band engineered hot electrons (EBEHE) energized by sharp energy band bending at the edge of source/drain (S/D) is proposed for a high speed flash memory programming...
In this work, we have compared different FB-RAM architectures. Whereas highly doped PDSOI devices show high programming window and retention times for long channel devices, the SOI FinFET devices with WFIN=25 nm can be scaled down to LG=50 nm while still maintaining high cell margins and retention times. For the latter devices optimization of the write and especially read bias conditions is needed.
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