The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
MEMS (Micro-Electro-Mechanical Systems) have been used widely in almost all the major industries, while few companies have commercial products in MEMS gyroscope. Besides, there are not many papers on the sensor design, and the papers regarding the packaging for gyroscopes are few, partly due to its highly proprietary nature [1]. The fabrication imperfections are unavoidable during MEMS gyroscope manufacture...
This paper describes linear load-sensitive continuously variable transmission with the spherical driving unit. This CVT mechanism consists of spherical drive, drive axis, motor housing, fixed bracket and linear sliding plate. It changes the reduction ratio continuously by inclination angle of active rotational axis. Additionally, this linear mechanism has a load-sensitive function by changing inclination...
In this paper a new concept to identify environmental loads during the interaction with the human body by sensing interface forces and movement is proposed. Mass and spring loads were moved by hand over a fixed height difference. Kinematic and kinetic quantities were measured between the hand and the load using an instrumented handle. Force was measured using a force transducer module, movement was...
Mobile sensors with jumping ability provide several advantages compared with the traditional wheeled sensors such as ability to move in rugged terrain. A controllable jumping robot for this purpose is described in this paper. The robot has dimension about 9.5cm × 9cm × 3cm and weighs 54.1 grams. It can perform the jumping process continuously. This paper focuses on the mechanisms to achieve such a...
This paper concerns the construction and function of a test foot with a passive toe joint. This was developed within the scope of the EU project ALEAR (artificial language evolution on autonomous robots) together with a test leg for the humanoid robot "M-Series" to test different function principles. In particular the sensor types are exemplified which are used in this foot. Further, the...
This paper presents kinematic analysis of a vertical type 6 DOF reticle stage for lithography process and a novel mapping method using a ratio of input-output relationship. The vertical type reticle stage system was designed for installing masks in photo-lithography process, and controlled using six precise gap sensors. As the stage is directly actuated by voice coil motors (VCM) and supported by...
For the study between macro and micro friction force test and experimentation, a novel micro force testing apparatus is built up in this paper. In this apparatus the force sensing system is the key component, which determines the measuring accuracy and scope. The structure of force sensing system is designed and optimized on the basis of the theoretical calculation and finite element analysis. The...
Engineers and technicians at the Idaho National Laboratory invented, designed, built and tested a device capable of detecting and measuring the distance to an underground void, or tunnel. Preliminary tests demonstrated positive detection of, and range to, a void thru as much as 30 meters of top-soil earth. Device uses acoustic driving point impedance principles pioneered by the Lab. for well-bore...
This paper presents a haptic interface for simulation of catheter operations used in gastrointestinal endoscopy. The haptic device is small and light to be attached to the instrument channel port of the actual endoscope handle used in the endoscopy simulation. The interface is a passive brake type. Solenoids and springs are used for force feedback. The feedback force is regulated by voltage change...
Pb1-xSrx (Zr0.53Ti0.47) O3 (PSZT) thin films have been fabricated on Pt/Ti/SiO2/Si substrates by a sol-gel method combined with a rapid thermal annealing process. It is shown that the introduction of Sr2+ into the PZT thin films favors the growth of (111) orientation. The orientation ratio of (111) is increased from 0.304, 0.475 to 0.849 with the increase of the x value. The dielectric measurement...
This paper reports the design and simulation results of the symmetrical and decoupled CMOS-MEMS gyroscope that utilizes the vertical capacitance change between the proof mass and sensing electrode. In order to reduce the lateral curling, a special beam with inversed-tapered cross-section has been designed. The gyroscope is fabricated through a standard 0.35 mum 2P4M CMOS-MEMS process. The dynamical...
Micro electro mechanical systems (MEMS) technology has developed considerably in recent years and many sensors utilizing this technology are available in the market. MEMS technology enables miniaturization, mass production, and cost reduction of many sensors. In particular, MEMS inertial sensors that include an acceleration sensor and an angular velocity sensor (gyroscope, or simply ldquogyrordquo)...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.