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This paper reports the first measurement of the electromechanical coupling coefficient (K2) for the Rayleigh wave in 4H polytype of Silicon Carbide (SiC). We fabricate 18 acoustic delay lines on two 4H SiC chips. Transmitted acoustic signals are measured at 423 MHz and 676 MHz for devices with 16 μm and 10 μm wavelength, respectively. We post-process the transmitted signal in time-domain to isolate...
We study methods to improve the Q of a variety of highly-stressed resonators for cavity optomechanics. We realize ultrahigh-Q metal/Si3N4 membranes and crystalline membranes, and have begun to control external dissipation via modified support structures.
We have constructed a monolithic Fabry-Perot cavity optomechanical system. From cryogenic temperatures we significantly damp a Si3N4-membrane and achieve conditions suitable for cooling MHz mechanical resonators from ∼ 4 K into the quantum regime.
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