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Mechanical stiffness in piezoelectric actuators restrains their output property and suppresses the output energy in general. We aimed to enhance the output energy of displacement amplified piezoelectric actuators (DAPAs) by employing rolling joint mechanisms with high energy transmissibility. By using the proposed design method for the shape of the rolling joints, we developed a DAPA with a novel...
We demonstrate a simple and precise measurement system of dynamic displacement for more-than-10-MHz high-frequency vibration. An interferometer using high-frequency phase modulation and simple data processing achieved a small error of better than 0.7 nm.
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