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This paper presents a study performed to evaluate the benefits of stress control metrology in Silicon Germanium (SiGe) epitaxy. Various in-line and off-line metrology tools are studied and compared, such as using OCD (Optical Critical Dimension) to monitor SiGe profile, using SE (Spectroscopic Ellipsometry), HRXRD (High Resolution X-ray Diffraction), SIMS (Secondary Ion Mass Spectrometry) to achieve...
X-ray photoelectron spectroscopy (XPS) can be used for surface layer characterization. Thin film thickness and composition can be determined. This paper presents a study performed to evaluate the benefits of high-k metal gate films measurement using a novel and high throughput in-line XPS technique. Various thin films such as SION and HfO2 are measured. The strengths and drawbacks of XPS are presented...
The overwhelming amount of various monitoring and log data generated in multitier IT systems makes problem determination one of the most expensive and labor-intensive tasks in IT Services arena. Particularly the initial step of problem classification is complicated by error propagation making secondary problems surfacing on multiple dependent resources. In this paper, we propose to automate the process...
The objective of the paper is to provide a brief overview of localized recursive techniques for assessment of severity of voltage disturbances potentially leading to voltage collapse, to quantify some of their limitations, especially when dealing with discontinuous state transitions due to contingencies and activation of generator limiters, as well as transients caused by a faster dynamics of the...
After the research of automation and flexible production, the intelligent press forming is the main research object of sheet metal forming. The key technologies of real-time monitoring, identifying, predicting and controlling were studied, which constitute the basis of the intelligent deep drawing control theory. In this paper, a control rule of BHF(blank hold force) based on the mechanical model...
China is a coal accident-prone country. In all coal accidents, the most serious incident is roof accident. Roof accidents are account for over 45% of the total mortality in coal enterprises. Roof accident is threatening the lives and safety of miners, and seriously affects the output of enterprises and economic benefits. Industrial Ethernet has been developed based on the roof abscission layer computer...
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