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In this paper, we investigate Low Pressure Chemical Vapor Deposition (LPCVD) SiN as a gate isolation material for AlGaN/gallium nitride (GaN) MIS-high electron mobility transistor power transistors. We compared the dielectric failure by forward-biased constant-current stress time-dependent dielectric breakdown measurements and statistical Weibull analysis. Several 4” AlGaN/GaN-on-Si wafers have been...
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