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Precise Vg-pulse response of low-voltage FeFETs were systematically investigated for the first time. The FeFETs showed good reproducibility of the Vth values controlled by voltage height, time width, and number of the imposed Vg pulses. Parameter extractions of the static and dynamic ferroelectric characteristics are valuable for modeling the FeFETs and simulating the analog circuits. 10^9 cycle endurance...
3D WLCSP using via last TSV (through silicon via) technology is an ideal packaging technology to meet small-form-factor, high I/O density, high-speed and most important, lower cost. For thin 3D WLCSP with TSVs, a number of critical processes need to be developed such as oxide etch, via cleaning and wafer de-bonding. In the present paper, processes for 8 inch, thin WLCSP with TSV diameter of 40µm and...
Correlated photon pairs at 1.5 μm are generated in a silicon waveguide with length of 1.6 mm. The ratio between coincident and accidental coincident counts is 19, showing low Raman noise and strong correlation. Photon pair generation shows strong dependence on pump polarization, fitting well with theoretical analysis.
A thermo-pneumatically actuated tunable microlens has been developed as a completely integrated system with on-chip actuation and temperature sensing. The focal length of the microlens can be adjusted over a wide range without any external pressure controller. The module consists of a structured silicon chip, a spin-coated PDMS membrane, an optical fluidic chamber, a thermal cavity, and a heating...
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