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In the paper a new type of photoelectric pressures sensor analitical model comprising optomechanical and photosensitive parts intended for use in explosive and fire hazardous conditions is discussed. Within the simplified analytical model considers the influence of design parameters of optomechanical and photosensitive parts on the conversion characteristics of pressure sensor.
In the paper results of pressure sensor with optical spatial modulation research are presented. The simulation of photoelectric and optomechanical parts comprising of sensor assembly was carried out. The transforming characteristics of sensor samples with membranes of 39 and 78.5 µn thick were investigated and corresponding sensitivities were received. The transforming characteristics dependence on...
The results of experimental investigation of formation features of the 3D boss with embedded V-groove for the optic fber, comprised in optomechanical part of MOEMS photovoltaic pressure sensor are presented. Dependences of ratio change of length of edges <110> and <410> forming underetching compensators of convex corners of the chip have been obtained. To provide good quality of the boss...
A 2D numerical model of the photoelectric part of silicon photoelectric pressure sensor is proposed. This part consists of a differential pair of photodiode designed by a standard silicon CMOS technology. The model is based on the area partition of a photodiode into separate segments. It is shown that the resistance of dark area segments decreases the magnitude of the output signal of the photoelectric...
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