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The development of wireless energy transfer is critical to the promotion of implantable medical devices (IMDs). In this paper, an aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducer (pMUT) array is designed, fabricated and characterized, which can be a potential power supply for IMDs. The pMUT array is ideally suitable for integration with wireless-powered system since it...
This paper presents technologies of wafer-level vacuum sealing and encapsulation at low temperature with CMOS compatible process and materials for fabrication of thermoelectric power generators (TPGs). A novel design of TPG with thermal legs embedded in the cavities is proposed. Results of simulation validate that the two cavities maximize the temperature difference between the hot and cold junctions...
A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder based wafer bonding technology, we can bond three pieces of wafers to form vacuum packaged TPG. According to the finite element method and analytical modeling results, the output power per area of device is derived as 68.6 muW/cm2 for temperature difference of 6degC between two ends of thermocouple...
A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder based wafer bonding technology, we can bond three pieces of wafers to form vacuum packaged TPG. According to the finite element method and analytical modeling results, the output power per area of device is derived as 68.6 muW/cm2 for temperature difference of 6degC between two ends of thermocouple...
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