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Multi-channel, fully integrated CMOS optical receivers combining with spatially modulated photo detector (SMPD) array, transimpedance amplifiers, and limiting amplifiers are presented. It demonstrates scalable channel numbers with minimum area overhead and low cross talk of less than 0.1 dB. The receiver array is implemented in 0.18 μm CMOS and provides 20 Gbps throughput (5Gbps × 4). The conversion...
Thickness variations of ILD CMP induced yield loss at wafer edge is simulated by 3D Sentaurus Interconnect, in order to achieve more authentic condition, we adopt the image contour extraction technique to stream the genuine contact contour gds together with STI, POLY, ML database. The results demonstrates that when the thickness is over 7k at wafer edge, there is no electric current found, and it...
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