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We report here the fabrication of comb drive III-nitride micro mirror on an III-nitride/silicon platform. Silicon substrate is first patterned from the backside and removed by deep reactive ion etching (DRIE). III-nitride microstructures are defined on freestanding III-nitride slab by backside alignment technique and generated by fast atom beam (FAB) etching. The fabricated comb-drive III-nitride...
We present a varifocal scanning micro-mirror fabricated from silicon-on-insulator wafer. The varifocal scanning micro-mirror consists of a varifocal membrane mirror with a rotational scanning function. The scanner and varifocal mirror are driven by the comb and parallel plate electrostatic actuators, respectively. The mirror rotates 5 degrees at 45V. And the varifocal mirror changes the curvature...
We describe the design, fabrication, and high vacuum packaging process of 2D scanner. The resonant frequencies of 2D scanner after packaged in vacuum are 30 kHz and 290 Hz for the inner mirror and the gimbal frame, respectively. The rotation angles of packaged 2D scanner are 25° and 16° at driving voltages of 20 V and 12 V for the inner mirror and the gimbal frame, respectively. To compromise the...
An optical scanner with a deformable mirror is fabricated using SOI wafer. A 1 mum thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80 V. The...
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